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Microsystem technology and its application:

Example 1

Step1 : HMD and spin-coating

Step3(1) : Exposure volume measurement

Step4(1) : Exposure 

Step5(1) : Development

Step6 : After develop clerner

Step2 : Pre-Exposure Bake

Step3(2) : Exposure volume measurement

Step4(2) : Exposure

Step5(2) : Development

Step7 : Wastewater treatment and recovery

Microsystem technology and its application:

Example 2

Step1:BOE etching

Step2:KOH etching

Microsystem technology and its application:

Example 3

Step1:PDMS mixing

Step2:PDMS casting

Step3:PDMS curing

Microsystem technology and its application:

Example 4

Electroforming and rolling over

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